上海微系统所卫星激光通信用高精度MEMS快反镜取得进展

美港电讯
07 May

【上海微系统所卫星激光通信用高精度MEMS快反镜取得进展】金十数据5月7日讯,中国科学院上海微系统与信息技术研究所传感器技术全国重点实验室在集成角度传感器的高性能MEMS快反镜研制方面取得重要进展。制备的MEMS快反镜镜面尺寸大,封装体积小,并具备良好的线性度、角分辨率、响应速度、重复定位精度和镜面动态形变,同时集成了高灵敏度角度传感器,能够实现更精确的激光光束闭环控制,在激光卫星通信方面具有巨大的应用潜力。快反镜在卫星激光通信中承担着光束的指向、捕获和跟踪等重要作用。

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