Onto Innovation (ONTO) reported Q4 non-GAAP diluted earnings Thursday of $1.51 per share, up from $1.06 a year earlier.

Analysts polled by FactSet expected $1.41.

Revenue for the quarter ended Dec. 28 was $263.9 million, up from $218.9 million a year earlier.

Analysts surveyed by FactSet expected $260.6 million.

The company expects fiscal Q1 non-GAAP diluted earnings of $1.40 to $1.54 on revenue of $260 million to $274 million.

Analysts polled by FactSet expect $1.49 on revenue of $267.4 million.