Nova (NVMI) reported Q4 non-GAAP earnings Thursday of $1.94 per diluted share, up from $1.36 a year earlier.

Analysts polled by FactSet expected $1.84.

Revenue for the quarter ended Dec. 31 was $194.8 million, up from $134.2 million a year earlier.

Analysts surveyed by FactSet expected $187.6 million.

For Q1, the company expects non-GAAP earnings of $2.00 to $2.16 per diluted share on revenue of $205 million to $215 million. Analysts polled by FactSet expect non-GAAP earnings of $1.88 per share on revenue of $194.1 million.

Shares of the Israeli semiconductor components firm were up 5% in recent Thursday premarket activity.