MKS Instruments (MKSI) reported Q4 non-GAAP diluted earnings late Wednesday of $2.15 per share, compared with $1.17 a year earlier.

Analysts polled by FactSet expected $1.95.

Revenue for the quarter ended Dec. 31 was $935 million, up from $893 million a year earlier.

Analysts surveyed by FactSet expected $914.2 million.

The company said it expects Q1 non-GAAP diluted earnings of $1.40 per share, plus or minus $0.27, on revenue of $910 million, plus or minus $40 million.

Analysts polled by FactSet expect $1.62 on revenue of $908.2 million.

Shares of the company fell 6.5% in recent after-hours activity.

Price: 104.00, Change: -7.20, Percent Change: -6.47