MKS Instruments (MKSI) reported Q1 non-GAAP earnings late Wednesday of $1.71 per diluted share, up from $1.18 a year earlier.

Analysts polled by FactSet expected $1.45.

Revenue for the quarter ended March 31 was $936 million, up from $868 million a year earlier.

Analysts surveyed by FactSet expected $915.8 million.

For Q2, the company expects non-GAAP EPS of $1.56, plus or minus $0.28, on revenue of $925 million, plus or minus $40 million. Analysts polled by FactSet expect EPS of $1.67 on revenue of $937.6 million.

Shares of the company were up 2.3% in after-hours activity Wednesday.