Onto Innovation (ONTO) reported Q1 non-GAAP earnings late Thursday of $1.51 per diluted share, up from $1.18 a year earlier.

Analysts polled by FactSet expected $1.47.

Revenue for the quarter ended March 29 was $266.6 million, up from $228.8 million a year earlier.

Analysts surveyed by FactSet expected $266.3 million.

The company set Q2 non-GAAP EPS guidance of $1.21 to $1.35 on revenue of $240 million to $260 million. Analysts expect EPS of $1.50 on revenue of $268.4 million.

Shares of Onto Innovation were down 8% in after-hours trading.