Aixtron SE’s 2025 remuneration report outlines Executive Board pay under a system approved in May 2024 and now fully applied after transitional arrangements ended in 2025. Fixed pay is paid monthly 13 times per year, with fringe benefits such as a company car and pension contributions. Short-term incentives are cash-based and tied to consolidated net profit (70%), market position (15%) and financial/operational targets (15%), with payouts capped at 250% and eliminated if net profit is zero or negative. Long-term incentives are share-based over a three-year period with a four-year holding requirement; from 2025, LTI weighting shifts to 35% net profit, 50% total shareholder return and 15% sustainability targets, and the TSR peer group expands to 12 semiconductor equipment makers including ASML, Applied Materials, Lam Research and Tokyo Electron.

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