Entegris (ENTG) and JSR signed a non-exclusive cross-licensing agreement to advance extreme ultraviolet lithography for chip manufacturing, the companies said late Tuesday.

The collaboration supports the application of advanced materials in semiconductor manufacturing as the companies scale frontier technologies for the artificial intelligence era, they said.

Entegris and Inpria will cross-license metal oxide resist patents, end any inter partes review challenges and consider collaborations on photoresist materials, they added.