Nova (NVMI) reported Q1 adjusted earnings Thursday of $2.18 per diluted share, up from $1.39 a year earlier.
Analysts polled by FactSet expected $2.09.
Revenue for the quarter ended March 31 was $213.4 million compared with $141.8 million a year earlier.
Analysts surveyed by FactSet expected $210.1 million.
The company said it expects Q2 adjusted earnings of $1.96 to $2.14 per diluted share on revenue of $210 million to $220 million. The consensus is for $2.10 and $215.2 million, respectively.
Nova shares were up 2.7% in recent premarket activity.