Axcelis Technologies (ACLS) reported Q1 non-GAAP earnings Tuesday of $1.04 per diluted share, down from $1.68 a year earlier.
Four analysts polled by FactSet expected $0.39.
Total revenue for the quarter ended March 31 was $192.6 million, down from $252.4 million a year earlier.
Analysts surveyed by FactSet expected $184.9 million.
The company said it expects Q2 non-GAAP EPS of $0.73 on revenue of roughly $185 million. Four analysts polled by FactSet expect non-GAAP EPS of $0.49 and revenue of $189.2 million.
Axcelis' stock was up 6% in recent Tuesday premarket activity.