MKS (MKSI) reported Q1 non-GAAP earnings late Wednesday of $2.30 per diluted share, up from $1.71 a year earlier.

Analysts surveyed by FactSet expected $2.04.

Revenue in the three months ended March 31 rose to $1.08 billion from $936 million a year earlier.

Analysts polled by FactSet expected $1.05 billion.

MKS expects Q2 non-GAAP EPS of $2.90, plus or minus $0.30, on revenue of $1.2 billion, plus or minus $40 million.

Analysts expect EPS of $2.37 on revenue of $1.09 billion.

MKS shares jumped 10% in after-hours trading.