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大族激光科技產業集團中標河北美泰電子MEMS傳感器組裝段採購項目

吉林大學和瀋陽儀表科學研究院申請一種壓力傳感器及加工方法專利，解決MEMS壓力傳感器存在耐高温性和靈敏度低的問題

VAT控股申請用於MEMS器件的氣體類型補償專利，基於聯合處理導出壓力和/或分子參數的至少一個值

硅光機器公司等申請用於LIDAR應用的利用MEMS相控陣的垂直光束調控專利，光探測和測距(LIDAR)系統含隨機訪問指向的掃描系統

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