专利摘要显示，本发明涉及一种单轴面外 MEMS 陀螺仪，包括衬底、锚点单元、运动单元以及电极单元，运动单元包括四个驱动框，四个驱动框沿 x 方向和 y 方向阵列布置，驱动框具有沿 x 方向线性运动的自由度，沿 x 方向布置的两个驱动框之间设有沿 x 方向布置的两个质量块，质量块通过第一解耦梁连接沿 x 方向相邻的驱动框，沿 x 方向布置的两个质量块之间设有检测框，检测框具有绕 y 方向摆动的自由度，检测框通过第二解耦梁连接沿 x 方向相邻的两个质量块，电极单元包括驱动模态激励电极和敏感模态检测电极。采用二级解耦的方式实现驱动框运动与检测框运动相解耦，能够从结构层面上降低陀螺正交误差，进一步降低陀螺的零偏指标，为实现高性能单轴面外 MEMS 陀螺仪打下基础。
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