截至2025年5月20日 11:06，中证半导体材料设备主题指数上涨0.11%，成分股中科飞测上涨2.95%，耐科装备上涨2.55%，联动科技上涨2.04%，三佳科技上涨1.87%，金宏气体上涨1.75%。半导体材料ETF上涨0.09%，最新价报1.07元。拉长时间看，截至2025年5月19日，半导体材料ETF近1年累计上涨27.38%。资金流入方面，半导体材料ETF最新资金流入流出持平。拉长时间...
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