截至5月19日收盘，中证半导体材料设备主题指数上涨0.68%，成分股富创精密上涨8.08%，三佳科技上涨4.85%，华海诚科上涨4.33%，金宏气体上涨3.63%，沪硅产业上涨2.86%。半导体材料ETF上涨0.47%，最新价报1.07元。流动性方面，半导体材料ETF盘中换手2.31%，成交738.39万元。整体来看，半导体材料ETF盘中交易活跃，持续出现溢价。份额方面，半导体材料ETF最新份额达...
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