在荷兰阿姆斯特丹举行的2025年技术论坛欧洲场中,台积电资深副总经理张晓强表示,公司目前暂无为先进制程导入High NA EUV的计划。他指出,最新公布的1.4nm级逻辑制程A14即便未采用High NA EUV图案化设备,性能提升依然显著。
Source Link在荷兰阿姆斯特丹举行的2025年技术论坛欧洲场中,台积电资深副总经理张晓强表示,公司目前暂无为先进制程导入High NA EUV的计划。他指出,最新公布的1.4nm级逻辑制程A14即便未采用High NA EUV图案化设备,性能提升依然显著。
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