金融界2025年5月31日消息，国家知识产权局信息显示，圆益IPS股份有限公司申请一项名为“基板处理装置及基板处理装置的维护方法”的专利，公开号CN120072608A，申请日期为2023年12月。
专利摘要显示，本发明涉及基板处理装置及基板处理装置的维护方法，更详细地说，涉及利用等离子体执行基板处理的基板处理装置及基板处理装置的维护方法。本发明公开一种基板处理装置，包括：工艺腔室(100)，上部形成开口部；背板(200)，结合到所述开口部，形成从外部引入气体的引入口(201)；盖板(300)，隔开设置于所述背板(200)上侧而覆盖所述背板(200)上部，形成贯通口(301)；支撑部(600)，设置在所述背板(200)，贯通所述盖板(300)的所述贯通口(301)，将支撑对象物从所述盖板(300)向上侧隔开支撑。
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