台积电A14制程仍不会采用High NA EUV光刻机

芯智讯
30 May

5月28日消息,虽然目前英特尔已经在其Intel 18A制程的研发过程中导入了ASML最新的High NA EUV光刻机,但是台积电似乎却不急于采用这类价格昂贵的设备,即便是尖端的A14制程也将不会采用。此前,台积电业务开发及全球销售高级副总裁张晓强就曾公开表示,虽然对High NA EUV能力印象深刻,但设备价格超过 3.5 亿欧元(3.78 亿美元)。目前的标准型EUV光刻机,仍可以支持台积电...

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