金融界2025年6月7日消息,国家知识产权局信息显示,中芯京城集成电路制造(北京)有限公司、中芯国际集成电路制造(上海)有限公司取得一项名为“一种热处理装置”的专利,授权公告号CN222953038U,申请日期为2024年07月。专利摘要显示,本申请提供一种热处理装置,包括:工艺腔室;承托环,设置在所述工艺腔室内,所述承托环包括环体,所述环体的第一面用于承托晶圆,所述第一面设置有限位部,所述限位部...
Source Link金融界2025年6月7日消息,国家知识产权局信息显示,中芯京城集成电路制造(北京)有限公司、中芯国际集成电路制造(上海)有限公司取得一项名为“一种热处理装置”的专利,授权公告号CN222953038U,申请日期为2024年07月。专利摘要显示,本申请提供一种热处理装置,包括:工艺腔室;承托环,设置在所述工艺腔室内,所述承托环包括环体,所述环体的第一面用于承托晶圆,所述第一面设置有限位部,所述限位部...
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