金融界2025年6月14日消息，国家知识产权局信息显示，细美事有限公司申请一项名为“加热器电路、其控制方法和衬底处理设备”的专利，公开号CN120152070A，申请日期为2024年11月。
专利摘要显示，本发明提出了一种无需二极管即可控制并联连接的多个加热器元件的加热器电路、所述加热器电路的控制方法以及衬底处理设备。用于在衬底处理设备中加热衬底的加热器电路包括：直流(DC)电源，所述直流电源配置为供应直流电压，其中所述直流电源的负极接地；前端开关阵列，所述前端开关阵列包括并联连接到所述直流电源的正极的前端开关；加热器阵列，所述加热器阵列包括加热器元件，所述加热器元件中的每一者的前端连接到所述前端开关；接地开关阵列，所述接地开关阵列包括并联连接在所述加热器阵列的所述加热器元件的后端与地之间的接地开关；以及后端开关阵列，所述后端开关阵列包括并联连接在所述直流电源正极与所述接地开关之间的后端开关。
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