方向错了?ASML的EUV光刻机,要走进死胡同了?

Ofweek光电信息网
16 Jun

目前全球只有一家厂商,能够制造EUV光刻机,那就是ASML。而全球目前几乎所有的7nm以下的芯片,均采用EUV光刻机来制造,所以EUV光刻机,代表的就是全球先进芯片工艺。考虑到EUV其实也是一代又一代升级,推动着芯片工艺的发展的,所以如果EUV光刻机一旦停止,全球的芯片工艺可能也会停止。而从目前的情况来看,目前ASML的EUV光刻机,前方已经无路可走,可能要走进死胡同里了。之前ASML推出的...

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