如果大家关注光刻机的发展历史就会知道,别看现在的荷兰ASML很厉害,但在早期真的只是一个小厂,日本的尼康、佳能比ASML牛很多。当年的尼康、佳能,根本就没有将ASML放在眼里,因为ASML技术不行,市场份额更是毫无可比性,没有逆袭的可能性。转折点是什么呢?当时尼康、佳能们已经研发出了DUV光刻机,采用193nm波长的光源。而在这种DUV光刻机后,尼康、佳能觉得应该进一步缩短光源的波长,实现分辨率的...
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