金融界2025年6月21日消息，国家知识产权局信息显示，应用材料以色列公司申请一项名为“用于光学检查系统的基于镜的中继设备”的专利，公开号CN120177508A，申请日期为2024年12月。
专利摘要显示，一种用于检查掩模或芯片的光学检查系统，该系统包括：物镜，用于收集来自被检查对象的光；中继组件，所述中继组件放置在物镜与成像组件之间的光学路径上，用于收集来自物镜的光，并将所收集的光中继到成像组件，其中光学检查系统进一步包括放置在物镜与中继模块之间的光学路径上的镜，用于以远离物镜的光轴并进入中继组件的光轴的角度改变光学路径的方向，中继组件包括反射表面，该反射表面被布置成使得所收集的光在中继组件内来回穿过三次。还描述了相关的装置和方法。
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