英诺激光在互动平台表示,公司的XBC激光图形化设备采用自主研发的激光器,使用双轨镜像结构,双轨各配置两套独立的激光加工系统,具备较高的产能与生产灵活性。主要用于刻蚀掩膜、制备PN区交叉指结构、PN区隔离及钝化膜开槽。目前该设备已在客户处量产验证。
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