用上30亿一台的EUV光刻机 Intel对14A仍有信心:没客户的可能不大

快科技
Sep 07, 2025

快科技9月7日消息,Intel公司今年将量产18A工艺,这是他们四年五代工艺中的关键一环,而且该工艺会持续改进,一直用到2030年。18A下一代工艺就是14A了,这一代还会用上High NA EUV光刻机,也就是ASML公司的Twinscan NXE:5000系列,NA提升到0.55,分辨率更高,是2nm节点以下的关键设备。相比当前EUV光刻机每台2亿美元的价格,Twinscan NXE:5000...

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