瑞声开泰申请悬臂梁制造相关专利,减少悬臂梁制造过程中的尺寸误差

市场资讯
Sep 05

国家知识产权局信息显示,瑞声开泰科技(武汉)有限公司申请一项名为“悬臂梁、其制造方法及包含该悬臂梁的MEMS器件”的专利,公开号CN120589681A,申请日期为2025年06月。专利摘要显示,本发明涉及悬臂梁制造技术领域,提供了一种悬臂梁、其制造方法及包含该悬臂梁的MEMS器件。该制造方法包括:步骤S1:提供SOI晶圆;步骤S2:刻蚀功能层,直至埋氧层停止刻蚀;步骤S3:在支撑层和/或功能层上...

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