来源:内容来自半导体行业观察综合。台积电正在将其位于新竹科学园区的已停产的旧8英寸晶圆厂3号晶圆厂重新利用,用于生产极紫外光防护薄膜(extreme ultraviolet pellicles),并将该生产流程移至内部。极紫外光防护薄膜是一种高度透明的薄膜,覆盖在光掩模上方,用于防止在极紫外光曝光期间颗粒接触光掩模。其设计旨在承受强烈的极紫外辐射和热应力,同时最大限度地减少光吸收和波前畸变。生产...
Source Link来源:内容来自半导体行业观察综合。台积电正在将其位于新竹科学园区的已停产的旧8英寸晶圆厂3号晶圆厂重新利用,用于生产极紫外光防护薄膜(extreme ultraviolet pellicles),并将该生产流程移至内部。极紫外光防护薄膜是一种高度透明的薄膜,覆盖在光掩模上方,用于防止在极紫外光曝光期间颗粒接触光掩模。其设计旨在承受强烈的极紫外辐射和热应力,同时最大限度地减少光吸收和波前畸变。生产...
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