Axcelis Technologies to Showcase New Innovations at International Conference on Silicon Carbide and Related Materials
Reuters
Sep 09
Axcelis Technologies to Showcase New Innovations at International Conference on Silicon Carbide and Related Materials
Axcelis Technologies Inc., a leading provider of ion implantation solutions for the semiconductor industry, will participate in the International Conference on Silicon Carbide and Related Materials (ICSCRM 2025) from September 14 to 19, 2025, in Busan, South Korea. During the conference, Axcelis will launch its new Purion Power Series+™ and GSD Ovation ES platforms, aimed at enhancing device capability and productivity for next-generation power devices. Axcelis technologists and collaborators will present topics including the industrialization of superjunction technology and the effects of pre-implantation on thermal oxidation of 4H-SiC.
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