据《韩国经济日报》报道,据报道,三星将于今年晚些时候收到其首款高数值孔径 (high-NA)EUV扫描仪——Twinscan EXE:5200B,随后将于 2026 年上半年推出第二台扫描仪。报告补充说,虽然该公司已经在其华城市园区运营了一种研究用途的高 NAEUV工具,但新系统将标志着其首次旨在大规模生产的收购。报告指出,竞争对手台积电目前正在测试该系统的研发版本,但尚未将其部署用于商业规模制造...
Source Link据《韩国经济日报》报道,据报道,三星将于今年晚些时候收到其首款高数值孔径 (high-NA)EUV扫描仪——Twinscan EXE:5200B,随后将于 2026 年上半年推出第二台扫描仪。报告补充说,虽然该公司已经在其华城市园区运营了一种研究用途的高 NAEUV工具,但新系统将标志着其首次旨在大规模生产的收购。报告指出,竞争对手台积电目前正在测试该系统的研发版本,但尚未将其部署用于商业规模制造...
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