台积电自研EUV光罩保护膜 推迟导入High-NA EUV光刻机

芯智讯
Oct 24, 2025

10月22日消息,光罩大厂Tekscend Photomask(科盛德光罩)近日于日本东京证交所挂牌上市,募资规模达1,566亿元日元。而随着Tekscend Photomask的上市,象征着半导体产业前进至埃米制程,扮演最前端制程的光罩重要性大大增加。供应链指出,光罩好比芯片制作的底片,光罩受污染会导致无法提升最终良率。因此,台积电自研光罩保护膜(Pellicle),主要因为2nm以下光罩...

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