晶盛机电近日在碳化硅（SiC）核心装备领域取得重大突破，12英寸单片式碳化硅外延生长设备顺利交付全球头部SiC外延芯片生产商瀚天天成。此次研发的12英寸单片式SiC外延设备可兼容8、12英寸SiC外延生产，其独创的垂直分流进气方案，实现了晶圆表面温度高精度闭环控制、工艺气体精确分区控制等技术，同时设备配备了自动化上/下料模块及一键自动PM辅助功能，大幅提升颗粒控制能力和维护效率。
晶盛机电近日在碳化硅（SiC）核心装备领域取得重大突破，12英寸单片式碳化硅外延生长设备顺利交付全球头部SiC外延芯片生产商瀚天天成。此次研发的12英寸单片式SiC外延设备可兼容8、12英寸SiC外延生产，其独创的垂直分流进气方案，实现了晶圆表面温度高精度闭环控制、工艺气体精确分区控制等技术，同时设备配备了自动化上/下料模块及一键自动PM辅助功能，大幅提升颗粒控制能力和维护效率。
Disclaimer: Investing carries risk. This is not financial advice. The above content should not be regarded as an offer, recommendation, or solicitation on acquiring or disposing of any financial products, any associated discussions, comments, or posts by author or other users should not be considered as such either. It is solely for general information purpose only, which does not consider your own investment objectives, financial situations or needs. TTM assumes no responsibility or warranty for the accuracy and completeness of the information, investors should do their own research and may seek professional advice before investing.