【海翔科技】泛林半导体 Lam Research Vector 系列 二手薄膜沉积CVD设备拆机/整

与非网
Jan 22

一、引言在半导体晶圆制造的薄膜沉积环节,化学气相沉积(CVD)设备是保障器件绝缘性能与结构完整性的核心装备,尤其在逻辑芯片介质层、存储芯片钝化层制造中发挥关键作用。泛林半导体(Lam Research)作为全球半导体设备寡头企业之一,其Vector系列CVD设备凭借高精度介质层沉积、宽工艺窗口适配等核心优势,已成为全球主流晶圆厂的标杆级装备,广泛应用于28nm及以上成熟制程的介质层沉积、钝化层制备...

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