ASML公布EUV光源进展,芯片产量有望2030年前增五成

格隆汇
Feb 24

ASML研究人员表示,他们已找到一种方法来增强关键芯片制造设备光源的功率,到本十年末可使芯片产量提高最多50%,以帮助这家荷兰公司在与崛起的美中对手的竞争中保持领先。ASML负责EUV光源技术的首席技术专家Michael Purvis称,新系统能在完全符合客户现场所有要求的前提下稳定输出1000瓦功率,到本十年末,每台设备每小时可处理约330片晶圆,较目前的220片显著提升。 EUV光刻机对芯片生产至关重要,在美国,至少有两家初创公司——Substrate和xLight——已筹集数亿美元资金,致力于开发与ASML技术抗衡的美国产品,其中xLight获得了特朗普政府提供的资金支持。

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