EUV应该是所有芯片设备中,最贵的设备了,一台普通的EUV光刻机,也需要1.5亿美元左右。而后来ASML升级技术,推出第二代NA=0.55的High EUV光刻机,价格就超过了4亿美元了,据称第二代NA=0.75的EUV光刻机,可能价格会高达7-8亿美元。EUV的价格一代比一代贵这么多,自然很多晶圆厂就不想买了,比如台积电,就想当第一代EUV光刻机的钉子户。毕竟台积电有100多台EUV光刻机,之前...
Source LinkEUV应该是所有芯片设备中,最贵的设备了,一台普通的EUV光刻机,也需要1.5亿美元左右。而后来ASML升级技术,推出第二代NA=0.55的High EUV光刻机,价格就超过了4亿美元了,据称第二代NA=0.75的EUV光刻机,可能价格会高达7-8亿美元。EUV的价格一代比一代贵这么多,自然很多晶圆厂就不想买了,比如台积电,就想当第一代EUV光刻机的钉子户。毕竟台积电有100多台EUV光刻机,之前...
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