金吾财讯 | 中信建投证券研究指，随着国产零部件供应商的持续研发突破与放量，该机构认为当前时间点对于零部件板块的投资更多聚焦于细分品类的赛道投资：一方面，关注对低国产化率赛道的投资，期待相关品类研发-送样-小批量的持续突破，如EFEM、机械手、真空泵/分子泵、阀门、静电卡盘、射频电源、MFC、光刻机相关零部件（双工件台/浸液系统、光学类零部件等）；另一方面，关注国产化进展顺畅、业绩逐步释放的品类投资，如机械大类金属零部件、气体输送子系统GASBOX等。同时，机构提示风险主要包括：无法跟随工艺制程演进及半导体设备更新迭代的风险、技术人才流失与核心技术泄密的风险、新产品及新工艺开发风险。
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