阿斯麦:英特尔实现High NA EUV高数值孔径光刻量产应用

智通财经
Jul 15
【阿斯麦:英特尔实现High NA EUV高数值孔径光刻量产应用】7月15日,阿斯麦宣布,英特尔代工已在Intel 18A工艺节点上,利用阿斯麦高数值孔径极紫外光刻技术量产部分Intel Core Ultra Series 3处理器,成为全球首家实现High NA EUV逻辑芯片高产量出货的企业。双方表示,Intel 18A部分工艺层已完成High NA EUV双重认证,产品良率已达到现有NXE EUV平台水平,并将继续推进该技术在未来制程节点的应用。

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