ChainCatcher 消息，据《The Information》援引知情人士报道，一家未公开名称的上海国资背景公司已开始生产国产浸没式DUV光刻机，计划今年制造约 5 台，到 2027 年 提升至约 20 台。首批设备将交付 中芯国际、华虹半导体和长鑫科技 等主要晶圆厂，但设备仍需经过精度、稳定性及产线兼容性验证，该过程可能持续数月甚至更久。
目前该设备多数部件来自国内，但部分关键零件仍依赖日本，性能和制造质量落后于 ASML。作为对比，ASML 仅 2025 年 即交付约 131 台浸没式 DUV 光刻机。国产设备虽已实现从原型测试到小批量生产的跨越，但距离大规模替代 ASML 仍有明显差距。此前路透社报道称，美国正考虑进一步收紧对华光刻设备出口及在华维修服务限制，此次国产设备交付恰逢这一背景。
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