ChainCatcher 消息，三星电子半导体研究所 Foundry 工艺开发团队朴昌民在“2026 下一代光刻+图案化学术大会”上表示，公司计划从 1 纳米（A10）工艺开始应用 High-NA EUV 技术，目标在 2030 年左右实现量产。三星目前在 2 纳米及以下工艺中仍采用现有 0.33 NA EUV 的多重图案化方案，计划 2029 年量产 1.4 纳米，后续再推进至 1 纳米。
High-NA EUV 将透镜数值孔径（NA）从 0.33 提升至 0.55，分辨率更高，可将原先需多重图案化的超微细工艺简化为单次图案化，有利于降低制造成本、提升生产效率和设计灵活性。但该技术难度高、设备昂贵，且需要配套材料技术同步升级。朴昌民预计 1.4 纳米和 1 纳米工艺仍以 0.33 NA EUV 多重图案化为主流，此后 High-NA 图案化将成为新一代工艺的核心技术。
Disclaimer: Investing carries risk. This is not financial advice. The above content should not be regarded as an offer, recommendation, or solicitation on acquiring or disposing of any financial products, any associated discussions, comments, or posts by author or other users should not be considered as such either. It is solely for general information purpose only, which does not consider your own investment objectives, financial situations or needs. TTM assumes no responsibility or warranty for the accuracy and completeness of the information, investors should do their own research and may seek professional advice before investing.