Qnity Electronics(Q)引入KLA下一代晶圆检测系统 部署高端光刻材料研发与量产

金吾财讯
Aug 20

金吾财讯 | Qnity Electronics(Q)宣布,在其位于马萨诸塞州马尔堡的新英格兰制造与技术中心成功安装了由科磊(KLAC)提供的Surfscan®SP7XP无图形晶圆缺陷检测系统。此举旨在深化公司在半导体先进工艺节点上的研发与制造能力,加速高端光刻材料的创新迭代。据介绍,此次设备部署将重点支持Qnity核心光刻材料产品的研发与稳定量产,包括用于深紫外(ArF)光刻的Epic®光刻胶系列、用于极紫外(EUV)光刻的Eon®光刻胶系列以及关键的底层配套材料。Qnity半导体技术副总裁Julia Woertink指出,掌控全流程的质量与性能细节是突破先进节点材料瓶颈的基础。随着人工智能(AI)、高性能计算(HPC)及先进连接技术对芯片性能提出更高要求,Qnity将继续加大材料与集成技术的战略投资,巩固其在全球半导体供应链中的竞争力。

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