瑞银:中国未来十年内难开发可媲美阿斯麦顶尖 EUV 光刻设备,DUV 量产或需两至五年

链捕手
Sep 02

ChainCatcher 消息,据彭博社报道,瑞银集团分析师预计,未来十年内中国半导体制造能力可能难以取得足够快的进展,从而开发出能够真正替代阿斯麦尖端 EUV 光刻技术的方案。瑞银分析师在报告中写道,“他们目前所处的阶段似乎与阿斯麦在 2004 年时相当”,从专利申请活动来看,尤其是在光源和激光子系统领域,中国当前技术成熟度大致相当于阿斯麦开始大规模生产 EUV 设备前 15 年的水平。

瑞银同时预计,中国有望在未来两到五年内具备浸没式 DUV 光刻机的大规模量产能力。浸没式 DUV 虽不如 EUV 先进,但仍是芯片制造不可或缺的设备。阿斯麦浸没式 DUV 售价近 9000 万美元,EUV 设备每台超 2 亿美元。中国是阿斯麦最大市场之一,但受出口限制,阿斯麦被禁止向中国出售 EUV 设备。瑞银指出,考虑到良率和产能差距及监管限制,中国光刻设备不太可能在境外得到应用。阿斯麦发言人对置评请求未作回应。该报道基于瑞银分析师的预测观点,实际进展以产业动态为准。

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