【中科仪：拟实施集成电路干式真空泵扩产项目】10月20日，中科仪公告，公司计划在已有募投项目“干式真空泵产业化建设项目”和“高端半导体设备扩产项目”基础上，实施集成电路干式真空泵扩产项目。项目资金来源为自筹资金，项目拟投资42,313.48万元，其中中国科学院沈阳科学仪器股份有限公司及上海分公司拟投资19,144.70万元，实施主体为中国科学院沈阳科学仪器股份有限公司；中科仪半导体设备有限责任公司拟投资23,168.78万元，实施主体为中科仪半导体设备有限责任公司。
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